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NANOFABRICATION

The PTA, Upstream Technological Platform, is a 1000 class clean room resulting from the pooling of  technical and human resources of IRIG (Institut de recherche interdisciplinaire du CEA Grenoble) and LTM (Laboratoire des Technologies de la Microélectronique du CNRS, UJF et INP). The clean room extends over 700 m2, 350 m² on CEA site and 350 m² in the Grenoble INP […]

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