NANOFABRICATION

The PTA, Upstream Technological Platform, is a 1000 class clean room resulting from the pooling of  technical and human resources of IRIG (Institut de recherche interdisciplinaire du CEA Grenoble) and LTM (Laboratoire des Technologies de la Microélectronique du CNRS, UJF et INP). The clean room extends over 700 m2, 350 m² on CEA site and 350 m² in the Grenoble INP site, within the CIME clean room ( InterUniversity MicroElectronics and nanotechnologies Centre).

The PTA offers the technical capabilities needed to cover a wide range of projects in nanosciences andmicro- nanotechnologies: complementary methods and equipment facilities for lithography, deposition or etching enable reliable integration of nano-objects and nano-materials or patterning of thin layers in the nanometric range. The PTA can accommodate all types of substrates from small 5 x 5 mm² sample up to the 100 mm wafers. A huge diversity of materials can be processed within a reasonable approach of contamination management

The research fields are numerous: nanoelectronics, MEMS & NEMS, magnetism and spintronics, integration of nano-materials and nano-objects, photonics, … The purpose of the facility is both to provide the needed means and skills to researchers, and to welcome industrial companies looking for a place to develop theirprojects.

Flexibility, ease of access and use, are the cornerstone of the management of the PTA. This pooling of facilities between the major players of upstream research in Grenoble means that a specific management system had been set up combining INAC and LTM complementary views and needs: here, users will find both a state of the art facility and an optimal flexibility.

http://pta-grenoble.com

The Team

Recent news

  • Designing magnetic memory with improved retention and writability (April 08th, 2022)Designing magnetic memory with improved retention and writability
    Magnetic Random Access Memory recently started to be commercialized by all main microelectronics factories. In MRAM, the information is coded via parallel or antiparallel magnetic configurations to represent ones and zeroes. The technology is intrinsically ...
  • A new spintronic memristive component for neuromorphic circuits (November 18th, 2021)A new spintronic memristive component for neuromorphic circuits
    Neuromorphic computing is a bio-inspired technology which aims at mimicking the brain working principles. It can be used for fast and energy-efficient applications through the implementation of networks of artificial neurons and synapses. Artificial synapses ...
  • NANOFABRICATION (February 03rd, 2021)
    The PTA, Upstream Technological Platform, is a 1000 class clean room resulting from the pooling of  technical and human resources of IRIG (Institut de recherche interdisciplinaire du CEA Grenoble) and LTM (Laboratoire des Technologies de la Microélectronique du CNRS, UJF ...
  • Unveiling the heart of magnetic memory cells thanks to electron holography (November 10th, 2020)Unveiling the heart of magnetic memory cells thanks to electron holography
    Magnetic spintronic memory called STT-MRAM have recently entered in volume production at major microelectronic foundries. The research in this area is now focused on preparing the future memory generations with higher capacity, higher speed, lower ...
  • All-optical switching of magnetization in Tb/Co-multilayer based electrodes (April 30th, 2020)All-optical switching of magnetization in Tb/Co-multilayer based electrodes
    This work reports the development of perpendicular magnetic tunnel junctions incorporating a stack of Tb/Co nanolayers whose magnetization can be all-optically controlled via helicity-independent single-shot switching. Toggling of the magnetization of the Tb/Co electrode was ...

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